Apparatus for vacuuming a substrate, system for vacuuming a substrate, and method for transporting a substrate carrier and a mask carrier in a vacuum chamber

摘要

A method for transporting a substrate carrier and a mask carrier in a vacuum chamber that accurately and smoothly transports the substrate carrier and the mask carrier through a processing system. An apparatus for vacuum processing a substrate includes a vacuum chamber including a chamber wall, a substrate carrier having a support surface, a mask carrier, and an alignment system. The alignment system has an actuator 318 and a mechanical isolation element 312 between the actuator and the vacuum chamber.