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Apparatus for vacuuming a substrate, system for vacuuming a substrate, and method for transporting a substrate carrier and a mask carrier in a vacuum chamber
Apparatus for vacuuming a substrate, system for vacuuming a substrate, and method for transporting a substrate carrier and a mask carrier in a vacuum chamber
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机译:用于抽真空基板的设备,用于抽真空基板的系统以及在真空室中运送基板载体和掩模载体的方法
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摘要
An apparatus for vacuum processing of a substrate is described. The apparatus includes a vacuum chamber, a substrate transport assembly, a mask transport assembly, and an alignment system having an actuator and a mechanical isolation element between the actuator and the vacuum chamber.
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