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Apparatus for vacuum processing a substrate, system for vacuum processing a substrate, and method for transporting a substrate carrier and a mask carrier in a vacuum chamber
Apparatus for vacuum processing a substrate, system for vacuum processing a substrate, and method for transporting a substrate carrier and a mask carrier in a vacuum chamber
An apparatus for vacuum processing a substrate will be described. The apparatus comprises a vacuum chamber, a substrate transfer assembly, a mask transfer assembly, and an alignment system comprising an actuator and a mechanical separation element between the actuator and the vacuum chamber. Including. [Selected figure] Figure 3A.
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