Center of Composite Materials;
Harbin Institute of Technology;
Harbin 150001;
China Center of Composite Materials;
Harbin Institute of Technology;
Harbin 150001;
China Center of Composite Materials;
Harbin Institute of Technology;
Harbin 150001;
China Center of Composite Materials;
Harbin Institute of Technology;
Harbin 150001;
China;
ta-C; films; substrate; negative; bias; X-ray; reflectivity; density;