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Apparatus for vacuum processing of substrates, systems for vacuum processing of substrates, and methods for transport of substrate carriers and mask carriers in a vacuum chamber
Apparatus for vacuum processing of substrates, systems for vacuum processing of substrates, and methods for transport of substrate carriers and mask carriers in a vacuum chamber
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机译:用于基板的真空处理的设备,用于基板的真空处理的系统以及在真空室内传输基板载体和掩模载体的方法
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摘要
An apparatus for vacuum processing of a substrate is described. The apparatus includes a vacuum chamber, a substrate transfer assembly, a mask transfer assembly, and an alignment system, the alignment system having an actuator and a mechanical isolation element between the actuator and the vacuum chamber.
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