Patent Issued for Vacuum Apparatus and Method for Conveying Substrate

摘要

2013 MAR 27 (VerticalNews) -- By a News Reporter-Staff News Editor at Journal of Engineering -- From Alexandria, Virginia, VerticalNews journalists report that a patent by the inventors Koizumi, Toshiyuki (Chigasaki, JP); Niikura, Kouichi (Chigasaki, JP), filed on September 3, 2009, was cleared and issued on March 12, 2013.