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FORMING METHOD OF YTTRIUM OXIDE FLUORIDE COATING FILM AND YTTRIUM OXIDE FLUORIDE COATING FILM PREPARED THEREBY
FORMING METHOD OF YTTRIUM OXIDE FLUORIDE COATING FILM AND YTTRIUM OXIDE FLUORIDE COATING FILM PREPARED THEREBY
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机译:氧化钇氟化膜涂层的形成方法及由此制备的氧化钇氟化膜涂层
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摘要
A forming method of an yttrium oxide fluoride (YOF) coating film and a (YOF) coating film formed thereby are disclosed. The YOF coating film has no or extremely small pores therein and a nanostructure to increase light transmittance thereof, and has high hardness and high bonding strength and thus can protect a transparent window of a display device. The method for forming an YOF coating film involves the steps of: providing pretreated YOF powder having a particle diameter ranging from 0.1 to 12 μm; receiving a transfer gas supplied from a transfer gas supply unit and receiving the pretreated YOF powder supplied from a powder supply unit to transfer the pretreated YOF powder in an aerosol state; and colliding/smashing (spraying) the pretreated YOF powder transferred in the aerosol state with/onto a substrate in a process chamber to form an YOF coating film on the substrate.
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