Method for forming yttrium fluoride coated coating film and its application to yttrium fluoride oxide coating film

摘要

Various examples of the present invention relate to the method for forming the yttrium oxide coating film and the yttrium oxide coating film produced by the method, and the technical problem to be solved is that there are no internal pores or the size is extremely small. A method for forming a yttrium oxide-coated film having a nanostructure, which not only has high light transmittance but also high hardness and bonding strength, and can protect the transparent window of a display device, and a yttrium oxide-coated film obtained by this method. Is to provide. For this purpose, the method for forming the yttrium fluoride oxide coating film according to various examples of the present invention includes a step of providing a pretreated YOF powder having a particle size range of 0.1 μm to 12 μm and a transfer gas supply unit. The transfer gas is supplied, the pretreated YOF powder is supplied from the powder supply unit, and the step of transferring the pretreated YOF powder in an aerosol state and the pretreated YOF powder transferred in the aerosol state are transferred. The process includes a step of colliding with and crushing (spraying) a base material in a chamber to form a yttrium oxide oxide coating film on the base material.