LONG-LIFE COPPER-MOLYBDENUM ETCHING SOLUTION AND ETCHING METHOD

摘要

A long-life copper-molybdenum etching solution, comprising: etching mother liquor and etching child liquor, wherein the main ingredients of the etching mother liquor comprise hydrogen peroxide, regulant, stabilizer, organic acid, inhibitor, pH regulator, and a remainder of deionized water; and the main ingredients of the etching child liquor comprise dissolvent, the organic acid, the inhibitor and the stabilizer. Also provided is an etching method for a copper-molybdenum metallic film.