Convection pattern estimation method of silicon melt, oxygen concentration estimation method of silicon single crystal, silicon single crystal manufacturing method, and silicon single crystal pulling device

摘要

The method of estimating the convective pattern of a silicon melt includes a step of applying a horizontal magnetic field having a strength of 0.2 Tesla or more to a silicon melt in a rotating quartz crucible using a pair of magnetic materials disposed with a quartz crucible therebetween. Before the seed crystal is deposited on the silicon melt to which the magnetic field is applied, the surface of the silicon melt passes through the center of the surface as viewed from the vertical top and is located on the first virtual line that is not parallel to the magnetic field line of the center of the horizontal magnetic field. Based on the process of measuring the temperature of the first measurement point and the second measurement point, and the measured temperature of the first measurement point and the second measurement point, the direction of convection in a plane perpendicular to the application direction of the horizontal magnetic field in the silicon melt is estimated. It has a process to do.