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Effects of surface properties on solder bump formation by direct droplet deposition

机译:表面特性对直接熔滴沉积焊料凸点形成的影响

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摘要

Recent advances in microdroplet generation and deposition processes have made it possible to directly form solder bumps on integrated circuits using micron-sized molten metal droplets. The direct droplet deposition bumping process can potentially produce uniform-sized bumps more economically than the existing processes such as plating and stencil printing. However, the development of this new bumping method is still in its infancy, particularly because of a lack of understanding about the post-impact deposition behavior of molten droplets on solid targets. A deposited molten on the deposition efficiency, as well as on the final bump size and shape. The present study investigates the effects of wetting and surface roughness on droplet bouncing during solder bump formation. The potential for droplet bouncing is modeled based on the energy difference between the maximum spreading and equilibrium sessile stages of a deposited droplet. Validated by experimental results, the model shows that strong droplet-surface wetting can significantly reduce the tendency for a deposited droplet to bounce. The effect of surface droplet can sometimes recoil violently after the initial spreading and rebound off the target surface. Such behavior, known as bouncing, has a strong influence roughness on the bouncing potential is represented by the roughness-induced incomplete wetting during droplet deposition, a phenomenon quantified by a change in the effective contact area under the deposited droplet. An idealized surface model is used to represent the real surface and to describe the relationship between various roughness parameters to changes in the effective contact area. The theoretical analysis, validated by empirical data, shows that surface effective
机译:微滴产生和沉积工艺的最新进展使得使用微米尺寸的熔融金属滴在集成电路上直接形成焊料凸点成为可能。与现有的电镀和模版印刷工艺相比,直接的液滴沉积凸点工艺可以更经济地产生均匀尺寸的凸点。然而,这种新的撞击方法的发展仍处于起步阶段,特别是因为缺乏对熔融液滴在固体靶上的撞击后沉积行为的了解。沉积的熔液对沉积效率以及最终凸块的尺寸和形状都有影响。本研究调查了润湿和表面粗糙度对焊料凸点形成过程中液滴反弹的影响。液滴反弹的潜力是基于沉积液滴的最大扩散阶段和平衡无蒂阶段之间的能量差建模的。通过实验结果验证,该模型表明强液滴表面润湿可以显着降低沉积液滴反弹的趋势。表面液滴的作用有时会在初始扩散后剧烈反冲并从目标表面反弹。这种行为被称为弹跳,对弹跳电势具有很强的影响,其粗糙度由液滴沉积过程中由粗糙度引起的不完全润湿表示,这种现象可以通过沉积的液滴下方有效接触面积的变化来量化。理想化的表面模型用于表示真实表面,并描述各种粗糙度参数与有效接触面积变化之间的关系。经经验数据验证的理论分析表明,表面有效

著录项

  • 作者

    Hsiao Wen Kai 1972-;

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  • 年度 2004
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  • 原文格式 PDF
  • 正文语种 en_US
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