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Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors

机译:基于谐振mEms应变传感器的高分辨率引伸计的制造和测试

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摘要

A novel type of linear extensometer with exceptionally high resolution of 4 nm based on MEMS resonant strain sensors bonded on steel and operating in a vacuum package is presented. The tool is implemented by means of a steel thin bar that can be pre-stressed in tension within two fixing anchors. The extension of the bar is detected by using two vacuum-packaged resonant MEMS double-ended tuning fork (DETF) sensors bonded on the bar with epoxy glue, one of which is utilized for temperature compensation. Both sensors are driven by a closed loop self-oscillating transresistance amplifier feedback scheme implemented on a PCB (Printed Circuit Board). On the same board, a microcontroller-based frequency measurement circuit is also implemented, which is able to count the square wave fronts of the MEMS oscillator output with a resolution of 20 nsec. The system provides a frequency noise of 0.2 Hz corresponding to an extension resolution of 4 nm for the extensometer. Nearly perfect temperature compensation of the frequency output is achieved in the temperature range 20-35°C using the reference sensor.
机译:提出了一种新型的线性引伸计,其基于结合在钢上并在真空封装中运行的MEMS共振应变传感器,具有4 nm的极高分辨率。该工具是通过一根细钢棒来实现的,该细棒可以在两个固定锚栓内预紧。使用两个真空包装的共振MEMS双端音叉(DETF)传感器(用环氧胶粘结在棒上)检测棒的伸出,其中一个用于温度补偿。这两个传感器均由在PCB(印刷电路板)上实现的闭环自振荡跨阻放大器反馈方案驱动。在同一板上,还实现了基于微控制器的频率测量电路,该电路能够以20 ns的分辨率对MEMS振荡器输出的方波前沿进行计数。该系统提供0.2 Hz的频率噪声,对应于引伸计的4 nm扩展分辨率。使用参考传感器可在20-35°C的温度范围内实现频率输出的近乎完美的温度补偿。

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