HIGH-RESOLUTION MAGNETIC FIELD SENSOR INTEGRAL WITH A SILICON BEAM RESONANT STRUCTURE MANUFACTURED IN MEMS TECHNOLOGY.

摘要

The invention refers to a magnetic field in MEMS technology which uses the Principle of Lorentz force for measuring the small magnetic fields (40 ÁT-2000 ÁT) with a high resolution (43 nT). This sensor has a linear response and a quality factor of Q=96.60 and a magnetic sensitivity of 1.94 VT-1. Furthermore, this sensor has a simple and compact structure, which is relatively easily manufactured and used in novel applications where tiny (of the micrometres order) sensors are required, of small weight, low power consumption and with a high resolution. The invention has the purpose of providing an improved resonant structure of silicon beams, which may detect the linear shape of small magnetic fields. In addition, the invention may be used in emerging applications that require measuring magnetic fields with high resolution and without using compensation circuits for compensating the nonlinearity problems. The sensor has a simple detection mechanism which consists in a Wheatstone bridge o f piezoresistors of the p type.