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Silicon micro-levers and a multilayer graphene membrane studied via laser photoacoustic detection

机译:硅微杠杆和多层石墨烯膜的激光光声检测研究

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摘要

Laser photoacoustic spectroscopy (PAS) is a method that utilizes the sensing of the pressure waves that emerge upon the absorption of radiation by absorbing species. The use of the conventional electret microphone as a pressure sensor has already reached its limit, and a new type of microphone - an optical microphone -has been suggested to increase the sensitivity of this method. The movement of a micro-lever or a membrane is sensed via a reflected beam of light, which falls onto a position-sensing detector. The use of one micro-lever as a pressure sensor in the form of a silicon cantilever has already enhanced the sensitivity of laser PAS. Herein, we test two types of home-made sensing elements - four coupled silicon micro-levers and a multi-layer graphene membrane - which have the potential to enhance this sensitivity further. Graphene sheets possess outstanding electromechanical properties and demonstrate impressive sensitivity as mass detectors. Their mechanical properties make them suitable for use as micro-/nano-levers or membranes, which could function as extremely sensitive pressure sensors. Graphene sheets were prepared from multilayer graphene through the micromechanical cleavage of basal plane highly ordered pyrolytic graphite. Multilayer graphene sheets (thickness similar to 10(2) nm) were then mounted on an additional glass window in a cuvette for PAS. The movements of the sheets induced by acoustic waves were measured using an He-Ne laser beam reflected from the sheets onto a quadrant detector. A discretely tunable CO2 laser was used as the source of radiation energy for the laser PAS experiments. Sensitivity testing of the investigated sensing elements was performed with the aid of concentration standards and a mixing arrangement in a flow regime. The combination of sensitive microphones and micromechanical/nanomechanical elements with laser techniques offers a method for the study and development of new, reliable and highly sensitive chemical sensing systems. To our knowledge, we have produced the first demonstration of the feasibility of using four coupled silicon micro-levers and graphene membranes in an optical microphone for PAS. Although the sensitivity thus far remains inferior to that of the commercial electret microphone (with an S / N ratio that is 5 times lower), further improvement is expected to be achieved by adjusting the micro-levers and membrane elements, the photoacoustic system and the position detector.
机译:激光光声光谱法(PAS)是一种利用通过吸收物质吸收辐射而产生的压力波的方法。传统的驻极体麦克风作为压力传感器的使用已经达到极限,并且已经提出了一种新型麦克风-光学麦克风-以提高该方法的灵敏度。微型杠杆或薄膜的运动是通过反射的光束来感应的,该光束会落到位置感应检测器上。使用一个微杠杆作为硅悬臂梁形式的压力传感器已经提高了激光PAS的灵敏度。在本文中,我们测试了两种类型的自制传感元件-四个耦合的硅微杠杆和一个多层石墨烯膜-可以进一步提高这种灵敏度。石墨烯片具有出色的机电性能,并作为质量检测器显示出令人印象深刻的灵敏度。它们的机械性能使其适合用作微/纳米杠杆或膜,可以用作极其敏感的压力传感器。石墨烯片材是通过多层石墨烯通过基面高度有序的热解石墨的微机械裂解而制备的。然后将多层石墨烯片(厚度类似于10(2)nm)安装在用于PAS的比色杯中的另一个玻璃窗上。使用从薄片反射到象限检测器上的He-Ne激光束来测量由声波引起的薄片的运动。离散可调谐CO2激光器用作激光PAS实验的辐射能量源。借助于浓度标准和流动状态下的混合装置,对所研究的传感元件进行了灵敏度测试。灵敏的麦克风和微机械/纳米机械元件与激光技术的结合,为研究和开发新型,可靠和高度灵敏的化学传感系统提供了一种方法。据我们所知,我们已经首次展示了在PAS光学麦克风中使用四个耦合的硅微杠杆和石墨烯膜的可行性。尽管迄今为止的灵敏度仍然不如商用驻极体传声器(信噪比低5倍),但通过调节微杠杆和膜元件,光声系统和扬声器,有望进一步提高灵敏度。位置检测器。

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