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Fabrication of w-AlNThin Films using Tilted Sputter Target and Unrotated Substrate Holder

机译：使用倾斜溅射靶和未电流基板支架制备W-ALNTHIN膜

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Anis Suhaili Bakri; Nafarizal Nayan; Mohd Khairul Ahmad; Soon Chin Fhong; Mohd Zainizan Sahdan; Ahmad Shuhaimi Abu Bakar; Wan Haliza Abdul Majid; Muliana Tahan; Nur Amaliyana Raship; Mohd Yazid Ahmad;
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1. Fabrication of w-AlNThin Films using Tilted Sputter Target and Unrotated Substrate Holder [J] . Anis Suhaili Bakri, Nafarizal Nayan, Mohd Khairul Ahmad, International Journal of Integrated Engineering . 2020,第4期

机译：使用倾斜溅射靶和未电流基板支架制备W-ALNTHIN膜
2. Fabrication of Cu(In,Ga)Se_2 thin films by ion beam sputtering deposition from a quaternary target at different substrate temperatures [J] . Ping Fan, Jing-rong Chi, Guang-xing Liang, Journal of materials science . 2012,第11期

机译：在不同衬底温度下通过四元靶离子束溅射沉积制备Cu（In，Ga）Se_2薄膜
3. Low substrate temperature fabrication of high-performance metal oxide thin-film by magnetron sputtering with target self-heating [J] . Yang W.F., Liu Z.G., Wu Z.Y., Applied Physics Letters . 2013,第11期

机译：靶控自热磁控溅射低衬底温度制备高性能金属氧化物薄膜
4. The Rotating Substrate Holder of Sputtering Deposition for Effective Growth of Thin Copper films [C] . Suchat Suwannatus, Udomdej Pakdee International Conference on Science and Technology . 2015

机译：溅射沉积的旋转基板保持器，用于薄铜膜的有效生长
5. Tilted Fibre Bragg Grating sensors. Application in monitoring of the chemical fabrication of nanometer metal films. [D] . Bialiayeu, Aliaksandr. 2010

机译：倾斜式光纤布拉格光栅传感器。在监测纳米金属膜化学制造中的应用。
6. Fabrication of Multiferroic Co-Substituted BiFeO3 Epitaxial Films on SrTiO3 (100) Substrates by Radio Frequency Magnetron Sputtering [O] . Husne Ara Begum, Hiroshi Naganuma, Mikihiko Oogane, 2011

机译：射频磁控溅射在SrTiO3（100）衬底上制备多铁共取代BiFeO3外延膜
7. Effect of Substrate Temperature and Target-Substrate Distance on Growth of TiO2 Thin Films by Using DC- Reactive Sputtering Technique [O] . Rabih, Laith, -, Sudjatmoko, Triyana, Kuwat, 2013

机译：直流反应溅射技术研究衬底温度和靶-衬底距离对TiO2薄膜生长的影响

Fabrication of w-AlNThin Films using Tilted Sputter Target and Unrotated Substrate Holder

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