Diffraction-Line Broadening Analysis and Stress Relaxation in Thin Metal Layers(Analyse van Diffractie-Lijnverbreding en Spanningsrelaxatie in Dunne Metaallagen)

摘要

This thesis has been subdivided into three parts, which have diffraction-linebroadening analysis in common. In Part I a correction for the inevitable problem of truncation has been developed. In Part II the separation of size and strain broadening has been investigated. In Part III a method for determination of the orientation distribution of dislocations have been developed and applied to the analysis of the mechanism of stress relaxation in thin metal layers.