Loose-Particle Detection in Microelectronic Devices.

摘要

The work described constitutes an evaluation of the test procedures and apparatus specified in MIL-STD-883,Test Method 2020,Particle Impact Noise Detection Test. The major experimental effort described - a comparison of procedures and apparatus -is based on the use of specially prepared specimen device packages known either to have or not to have a particle present. Other experimental efforts reported include characterization of the accelerations imparted to a specimen device by pre-and co-shock apparatus, a brief study of the effectiveness of couplant materials in transmitting mechanical energy to the specimen device,and a comparison of the output signal level from four different ultrasonic detection transducers under otherwise identical test conditions. As part of the plan of work, 252of the specially prepared devices,representing six package types,were characterized (as containing particles or not) by several test procedures in order to provide a set of specimens for use by the sponsor in a proposed interlaboratory evaluation of PIND testing. Problems associated with this effort are discussed. Results of the work are presented,together with conclusions and recommendations for further work. A result of interest is that the acceleration imparted by the single sample of the pre-test shock apparatus tested is on the order of 1.5times the maximum specified by the Test Method.