Photoelectron spectrometer with means for stabilizing sample surface potential

摘要

An improved X-ray photoelectron spectrometer is disclosed, which includes circuit means to determine the surface potential of a sample, e.g., an insulator. The circuit means comprise an electron gun, whose potential is modulated at a preselected frequency above and below a selected potential with respect to the spectrometer common potential, e.g., ground. The beam of electrons is directed to the sample surface. The sample's surface potential is offset by an offset power supply with respect to the spectrometer common potential until the ac current which flows through the sample reaches a peak amplitude. A lock-in amplifier is included to measure the ac current in phase with the modulating frequency.