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Sample holder and X-ray photoelectron spectrometer
Sample holder and X-ray photoelectron spectrometer
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机译:样品架和X射线光电子光谱仪
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摘要
The sample holder (30) comprises a sample mount (34), a secondary electron generating plate (31), and a transfer mechanism (33).The secondary electron generating plate (31) is designed to emit secondary electrons (38) by irradiating the X-ray (14).The moving mechanism (33) moves the secondary electron generating plate (31) to the sample mount (34).As the secondary electron generating plate (31) moves, the secondary electron generating plate (31) is so configured that the distance between the first major surface (34 A) of the sample mount (34) and the portion (32) of the secondary electron generating plate (31) located on the path of the X-ray (14) irradiated onto the specimen (20) changes A moving mechanism (33) is constituted.
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