Sample holder and X-ray photoelectron spectrometer

摘要

The sample holder (30) includes a sample mount (34), a secondary electron generating plate (31), and a moving mechanism (33). The secondary electron generating plate (31) is configured to emit secondary electrons (38) by being irradiated with X-rays (14). The moving mechanism (33) moves the secondary electron generating plate (31) with respect to the sample mount (34). As the secondary electron generation plate (31) moves, the secondary electrons located on the first major surface (34a) of the sample mount (34) and the path of the X-rays (14) irradiated on the sample (20). The secondary electron generating plate (31) or the moving mechanism (33) is configured so that the distance to the portion (32) of the generating plate (31) changes.