AUTOMATED ARRAY ASSEMBLY TASK IN-DEPTH STUDY OF SILICON WAFER SURFACE TEXTURIZING

摘要

Work on an "In-depth Study of Silicon Wafer Surface Texturizing", part of the JPL Automated Array Assembly Task, a Low-Cost Solar Array Project, was conducted during this quarter. This project covers the period from December 14, 1978 to March 31, 1979.nFour tasks were investigated in this program. Identification of Freon recycling as a low-cost wafer cleaning method was made. An ultrasonic vapor degreaser that utilizes the Freon recyling technique was ordered. Equipment was acquired to produce clean dry air. It was concluded that the low cost clean dry air system can replace the high cost dry nitrogen system without any adverse effects in the solar cell electrical performance. The texturizing process time in large scale production was found to be variable when chemical concentrations and temperatures in the two stage texturizing process were held constant.