Tribology of silicon nano-textured surfaces fabricated by rapid aluminum-induced crystallization of amorphous silicon.

摘要

This thesis reports the fabrication of silicon nano-textured surfaces (NTSs) by rapid aluminum-induced crystallization (RAIC) of amorphous silicon (a-Si) on silicon substrates and the tribological properties of these surfaces. The RAIC of a-Si process includes a-Si and aluminum thin-film depositions on the substrates, followed by annealing of the substrates and then etching away the excessive aluminum. The effects of various process parameters on the formation of the nano-textures were investigated. Silicon NTSs consisting of different particle sizes (0.024 to 0.120 mum2), heights (276 to 541 nm), and percentage area coverage (9.8 to 21.3%) were generated by controlling the annealing conditions and the a-Si film thickness. Tribological performance of the NTSs, including friction and adhesion, were studied using a TriboIndenter. More than 90% improvements in adhesion performance and up to 73% reduction in the coefficients of friction of the NTSs compared to those of a smooth silicon surface were observed.