Electron Energy Distributions and Excitation Rates in High Frequency Argon Discharges

摘要

The electron energy distribution functions and rate coefficients for excitation and ionization in argon under the action of a uniform high frequency electric field were calculated by numerically solving the homogeneous Boltzmann equation. The treatment is restricted to situations in which the electrons do not lose appreciable energy during a cycle of field oscillation. Analytic calculations in the limiting cases w is much v sub c and w is much v sub c where w is the wave angular frequency and v sub c is the electron neutral collision frequency for momentum transfer, are shown to be in very good agreement with the numerical computations. The results are relevant for improving theoretical descriptions of a plasma column sustained by surface microwaves.