Growth and Properties of co-Evaporated Superconducting YBACUO Thin Films

摘要

The fabrication, analysis, and applications of copper oxide superconducting thinfilms was studied. Superconducting copper oxides, and YBACUO system specifically, are introduced. Technical aspects of the particular method that were used for the thin film growth, the evaporation method, are considered. These include: the control of the evaporation flux of electron beam evaporators (a good control of the evaporation flux is very important in obtaining films with desired stoichiometry), the vacuum system, ozone generation, substrate heating and substrate temperature measurement, and stabilization of Knudsen cells. Some of the analysis methods used to characterize the films are discussed and analysis results of the produced films are given. The existing growth processes of YBaCuO films can roughly be divided in two types, the post anneal process and the in situ process. Both processes were used to make YBaCuO films. Properties of films that were made with the post anneal process and with the in situ process are reported. Results obtained making submicrometer structures in YBaCuO films are reported.