Electrostatically controlled micromechanical gyroscope

摘要

An integrated electrostatically-controlled micromechanical gyroscope with a rotor encompassed within a rotor cavity and electrostatically spun within the cavity. The gyroscope includes a plurality of axial electrostatic rotor actuators above and below the rotor for controlling the axial and tilt position of the rotor within the cavity, and a plurality of radial electrostatic actuators spaced circumferentially around the rotor for controlling the radial and tilt position of the rotor within the cavity. The position of the rotor within the cavity is then resolved to determine the external forces acting on the rotor.