A study of anti-reflective coatings to enhance the UV response of CCD's

摘要

While various research groups have obtained excellent results in the enhancement of the UV sensitivity of CCD's, repeatability and stability of those thin films have been major problems. The current collaboration is an engineering effort to take these technologies beyond the gross accuracy normally achieved by university groups. The Ball Aerospace Internal Research and Development effort has already deposited 900-1130 Angstrom layers of anti-reflective films on inexpensive silicon substrates and on MgF2 windows. The present test and evaluation program not only attempts to provide feedback on the quality of the depositions, but also seeks to validate two testing procedures that will become critical for achieving the desired properties of the thin film structures.