Effect of Primary Ion Energy and Surface Chemistry on the Secondary Ion Yields in Low Energy Sims Experiments

摘要

The chemisorption of oxygen on W(100) and Mo(100) single crystal surfaces was studied using a static mode SIMS technique at primary ion energies ranging from 150 eV to 2 keV. The following secondary ion yields O exp - , WO sub 2- , and MoO sub 2- were found to be sensitive to the changes in the chemisorbed oxygen layer at different stages of chemisorption. Significant enhancement in the sensitivity of the O exp - yield to the chemisorption process was observed when the energy of the Ne exp + primary ion energy was below 500 eV. (ERA citation 03:007090)