Internal current probing of integrated circuits using magnetic force microscopy

摘要

Magnetic force microscopy (MFM) has been applied to image currents in internal IC conductors. We present a model for the MFM imaging of IC currents, describe MFM signal generation, and demonstrate the ability to analyze current direction and magnitude with a sensitivity of (approximately) 1 mA dc and (approximately) 1 (mu)A ac. Our experimental results are a significant improvement on the 100 mA ac resolution previously reported using an electron beam to detect IC currents (1).