A new bifunctional topography and current probe for scanning force microscope testing of integrated circuits

摘要

A new probe for scanning force microscope testing of integrated circuits (IC) was developed enabling both investigation of topography and contactless current detection in conducting lines via evaluation of the magnetic field due to the currents by means of an anisotropic magento-resistive (AMR) sensor. Firstr measurements of the topography and the current detection down to 10μA with a frequency of 1 kHz are shown on a test structure containing 16μm and 4μm wide conducting lines. These promising results point out an application for advance function and failure anlaysis of integrated circuits in the near future.