Characterization of Intercalated Graphite Fibers for Microelectromechanical Systems (MEMS) Applications

摘要

Research was accomplished to characterize the electrical and physical characteristic changes of the Thornel(trade name) P-100 carbon fiber and five variants when intercalated with 96% sulfuric acid and incorporated the use of Microelectromechanical Systems (MEMS) structures for testing purposes. The five fiber variants were oxidized in 1 M nitric acid at 0.5 A for 30 seconds, 1 and 2 minutes, the last two samples were detreated at 1150 deg C for one hour prior to the nitric acid treatment. The fibers were mounted onto a MEMS die, placed into a chip carrier, sulfuric acid added, the chip carrier sealed and testing accomplished. This thesis explains the approach and methods that were completed to mount carbon fibers. We have designed MEMS structures with an inset trench that 10 &(number sign)956;m carbon fibers can be mounted into for testing. Which reduced the amount of coverage required to bind the fiber in place. The original and five anodically oxidized fibers were inspected with a scanning electron microscope (SEM), studied with Raman spectroscopy, and small signal responses were measured from 20Hz to 1 MHz.