Wafer-Bonded, Floating Element Shear-Stress Sensor Using a Geometric Moire Optical Transduction Technique

摘要

This paper presents a geometric Moire optical-based floating-element shear stress sensor for wind tunnel turbulence measurements. The sensor was fabricated using an aligned waferbond/thin-back process producing optical gratings on the backside of a floating element and on the top surface of the support wafer. Measured results indicate a static sensitivity of 0.26 microns/Pa, a resonant frequency of 1.7 kHz, and a noise floor of 6.2/square root Hz.