Design and calibration of a microfabricated floating-element shear-stress sensor

摘要

A microfabricated floating-element shear-stress sensor for measurements in turbulent boundary-layers is reported. Using surface micromachining of polyimide, a 500- mu m*500- mu m probe has been fabricated incorporating a differential-capacitor readout circuit. A model for the sensor response is described and is used for the design of an element to measure shear stresses of 1 Pa in air. The sensor is packaged for calibration in laminar flow, and electrical results obtained match the expected response.