High Actuator Count MEMS Deformable Mirrors for Space Telescopes

摘要

Micro Electro Mechanical Systems (MEMS) deformable mirrors are capable of correcting aberrations in space-based optical imaging systems. The small size, weight, and power requirements are ideal for space based adaptive optics. However, the yield, number of actuators, and surface accuracies can be improved. Yield is the proportion of the mirror segments that work. A low-power driver is also needed. The impact of microscopic manufacturing defects and substrate bowing were investigated. To reduce power consumption in the drive electronics, a multiplexed driver was investigated. A prototype of the multiplexed driver was constructed and will be used for future tests on a deformable mirror.