Integrated Silicon Device Technology; Volume V: Physical/Electrical Properties of Silicon

摘要

The various properties of silicon to which numbers can be assigned are discussed in this report. These numbers, as found in the literature, are listed for each effect or property. Some applications of these properties and the theory behind them are given. The properties are grouped under four general headings: mechanical and lattice properties, piezo-properties, electric-thermal-magnetic properties, and photo-properties. A companion volume will cover the chemical/metallurgical properties--none of which are covered in this volume. (Author)