Correction Factor Tables for Four-Point Probe Resistivity Measurements on Thin, Circular Semiconductor Samples

摘要

Extensive tables of the geometrical correction factors for four-point probe resistivity measurements on thin, circular semiconductor samples with all surfaces insulating are given, (1) for an in-line probe array displaced radially with points along a diameter, (2) for an in-line probe array displaced radially with the line of points perpendicular to a diameter, and (3) for a displaced square probe array. (Author)