Active Thin Film Optical Elements for Integrated Optics.

摘要

The objective of the work reported herein is to achieve multiple signal processing type operations in an active thin film element useful for the implementation of integrated optical circuits. This report discusses the structural requirements,theory,fabrication,and performance of active thin film optical waveguides suitable for the 10micron CO2laser radiation. Strong optical confinement has been achieved by utilizing the effects of free carrier depression and dispersion. Techniques for the fabrication of etched grating optical coupler and efficient interdigital transducers on the surface of GaAs thin films have been developed. By using properly selected GaAs epitaxial thin film elements with a carrier concentration