Preparation of arsenic sulfide thin films for integrated optical elements by spiral bar coating

摘要

We report on the preparation of thin As35S65 films from their amine based solutions by a spiral bar coating technique on flexible PET substrates and the direct writing of subwavelength surface corrugated gratings with a period of 350 nm into these films by excimer laser interference lithography. The structural and optical properties of bar coated As35S65 glass are investigated in detail and compared with those of samples fabricated by vacuum thermal evaporation. The polarization dependent spectral filtering properties of the guided mode resonance devices built by the waveguiding thin films and the surface relief gratings written by a single laser pulse are presented finally.