METHOD OF TRANSFERRING THIN FILM ELEMENT, THIN FILM ELEMENT, THIN FILM INTEGRATED CIRCUIT DEVICE, ACTIVE MATRIX SUBSTRATE, AND LIQUID CRYSTAL DISPLAY DEVICE

摘要

PPROBLEM TO BE SOLVED: To provide a novel technique by which a substrate used at the time of manufacturing a thin film element and another substrate (having a property desirable for the application of a product) used when, for example, the product is actually used can be selected independently and freely. PSOLUTION: After a separation layer (120) is provided on a highly reliable laser light-transmitting substrate (100), a thin film element (140), such as the TFT etc., is formed on the substrate (100). Then the element (140) is made to be peelable from the substrate (100) at the separation layer (120) by projecting laser light upon the layer (120) from the substrate (100) side. In addition, the element (140) is bonded to a transfer body (180) through an adhesive layer (160) and the substrate (100) is separated from the element (140). Consequently, a desired thin film device can be transferred to any kind of substrate. PCOPYRIGHT: (C)2004,JPO