Photolithographic Techniques for Surface Acoustic Wave (SAW) Devices. Volume 5. Quality Assurance Plan.

摘要

The Hughes Aircraft Company Ground Systems Group Quality System is designed to meet and implement the requirements outlined in MIL-Q-9858A, Quality Program Requirements. Procedures described establish effective organizations, programs and practices to assure timely and economic implementation of company Quality objectives and attainment of product quality consistent with contractual quality commitments. A description is given of the procedure to be implemented in the Microelectronics Technology (MELT) laboratory for specific application on the surface acoustic wave pulse compression, band-pass and tapped delay line filters.