Investigation of Diamond Film Deposition in a Premixed Oxyacetylene Flame.

摘要

Polycrystalline diamond film synthesis has been demonstrated using a wide variety of enhanced chemical vapor deposition (CVD) techniques. The method of choice depends on the end application of the deposited film or coating. Diamond film has been deposited in a single-nozzle pre-mixed oxy-acetylene flame. Results of runs of varying duration suggest that diamond is deposited via the transport of hydrocarbon fragments produced at the secondary flame front. Planar laser induced photodissociation fluorescence suggests that this region is rich in C2H species. Emission studies also suggest that the post primary flame zone presents a source of C2 radicals which may account for the observed graphite and diamond-like carbon deposited on the substrate exposed to this region of the flame. The results on the pre-mixed flame suggest that it would be possible and more convenient to attempt large area deposition using a multi-nozzle diffusion flame. Keywords: Carbon, Hydrocarbons. (aw)