Measurement and Analysis of Properties of Several Types of Films Doped withOxides

摘要

This article introduces several types of experimental equipment associated withthe measurement of stress, absorption, and scattering in thin films. It makes use of these systems to carry out measurements and tests on such characteristics as stress, absorption, scattering, focusing density, and so on, in a number of common oxides and their doping films. At the same time, with the help of Auger energy spectra techniques and X-ray diffraction technology, it analyzes the chemical constituents and crystal structure of films, obtaining a number of significant results. jg.