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White-Beam Synchrotron Topographic Analysis of Multi-Polytype SiC DeviceConfigurations

机译：多结型siC器件配置的白光束同步加速器形貌分析

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摘要

White beam synchrotron topographic analysis of SiC device configurations ofvarious polytypes has been carried out. The devices, p-n junctions of area 1 mm2,

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Dudley, M.; Huang, W.; Wang, S.; Powell, J. A.; Neudeck, P.;
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年度 1995
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总页数 8
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Crystal structure; Semiconductor junctions; Silicon carbides; Reprints; Chemicalvapor deposition; Reflection; Transport properties; Penetration; Profiles; Diffraction; Geometry; Grazing angles;

机译：晶体结构;半导体结;碳化硅;重印;化学气相沉积;反射;传输特性;渗透;轮廓;衍射;几何;掠角;

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专利

1. Synchrotron white-beam topographic studies of 2H-SiC crystals [J] . William M.Vetter, Wei Huang, Philip Neudeck Journal of Crystal Growth . 2001,第3a4期

机译：2H-SiC晶体的同步辐射白束形貌研究
2. White-beam synchrotron topographic characterization of antiparallel 180° domains in MgO doped near-stoichiometric LiNbO_3 [J] . Lei Gao, Ji Yang Wang, Hong Liu, Physica status solidi . 2008,第5期

机译：MgO掺杂近化学计量LiNbO_3中反平行180°域的白束同步加速器形貌表征
3. White-beam synchrotron topographic study of antiparallel 180 degrees domains in near-stoichiometric LiNbO3 grown from Li2O-rich melt [J] . Gao L, Hu XB, Wang JY, Journal of Crystal Growth . 2005,第3a4期

机译：富含Li2O熔体的近化学计量LiNbO3中反平行180度畴的白束同步加速器地形研究
4. Polytype Identification and Mapping in Heteroepitaxial Growth of 3C on Atomically Flat 4H-SiC Mesas Using Synchrotron White-Beam X-Ray Topography [C] . M. Dudley, W.M. Vetter, X.R. Huang, International Conference on Silicon Carbide and Related Materials 2001 Pt.1 Oct 28-Nov 2, 2001 Tsukuba, Japan . 2001

机译：同步加速器白束X射线形貌在原子平面4H-SiC台面上3C异质外延生长中的多态性鉴定和定位
5. Defect Characterization of 4H-SiC Substrates Using Synchrotron X-ray Topography [D] . Ailihumaer, Tuerxun. 2018

机译：同步X射线形貌表征4H-SiC衬底的缺陷
6. In situ 3D topographic and shape analysis by synchrotron radiation X-ray microtomography for crystal form identification in polymorphic mixtures [O] . Xian-Zhen Yin, Ti-Qiao Xiao, Ashwini Nangia, -1

机译：通过同步辐射X射线显微断层术进行原位3D地形和形状分析以鉴定多晶型混合物中的晶型
7. In situ 3D topographic and shape analysis by synchrotron radiation X-ray microtomography for crystal form identification in polymorphic mixtures [O] . Xian-Zhen Yin, Ti-Qiao Xiao, Ashwini Nangia, 2016

机译：原位3D地形和形状分析通过同步辐射X射线显微镜晶体形式鉴定多晶晶体混合物
8. White-Beam Synchrotron Topographic Studies of Defects in 6H-SIC Single Crystals [R] . Dudley, M., Wang, S., Huang, W., 1995

机译：6H-sIC单晶缺陷的白光束同步加速器地形研究

White-Beam Synchrotron Topographic Analysis of Multi-Polytype SiC DeviceConfigurations

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