GLANCING INCIDENCE X-RAY ANALYSIS - MORE THAN JUST REFLECTIVITY

摘要

Many analytical methods can be used to characterize thin-layered materials. Glancing incidence X-ray analysis (GIXA) has the potential to be a powerful and versatile analytical method because it combines X-ray reflectivity (XRR) and glancing incidence X-ray fluorescence (GIXRF). In this way, layer thickness, roughness and the elemental depth profile of the material can be obtained. In addition, non-specular measurements contain a wealth of information on the lateral roughness structure of the layer interfaces. (C) 1997 Elsevier Science B.V. [References: 17]