Self-aligned vertical mirror and V-grooves applied to an optical-switch: modeling and optimization of bi-stable operation by electromagnetic actuation

摘要

High performance silicon-based, micro-optical switches are being developed for application to optical networks. The mechanical part was fabricated in a one-level mask step by bulk micromachining of (100) monocrystalline silicon with KOH. The resulting structure was assembled with a 100 μm-thick Permalloy piece and then, it was associated to a small magnetic circuit for its electromagnetic actuation. In order to avoid power consumption while holding ON and OFF states, a bi-stable operation principle is proposed. The bi-stable behavior is obtained by using a stable mechanical position due to the cantilever stiffness and a second magnetic stable position due to a permanent magnet. Switching operation is provided by electrical currents in windings. The aim of this paper is to present a study on modeling and optimization of this system by means of Finite Element Modelling (FEM) simulations, using ANSYS software. Iterative magneto mechanical simulations are performed. Optimization of dimensions and material properties is presented.