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Self-aligned vertical mirror and V-grooves applied to an optical-switch: modeling and optimization of bi-stable operation by electromagnetic actuation

机译:自对准垂直反射镜和V型槽应用于光开关:通过电磁致动对双稳态操作进行建模和优化

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摘要

High performance silicon-based, micro-optical switches are being developed for application to optical networks. The mechanical part was fabricated in a one-level mask step by bulk micromachining of (100) monocrystalline silicon with KOH. The resulting structure was assembled with a 100 μm-thick Permalloy piece and then, it was associated to a small magnetic circuit for its electromagnetic actuation. In order to avoid power consumption while holding ON and OFF states, a bi-stable operation principle is proposed. The bi-stable behavior is obtained by using a stable mechanical position due to the cantilever stiffness and a second magnetic stable position due to a permanent magnet. Switching operation is provided by electrical currents in windings. The aim of this paper is to present a study on modeling and optimization of this system by means of Finite Element Modelling (FEM) simulations, using ANSYS software. Iterative magneto mechanical simulations are performed. Optimization of dimensions and material properties is presented.
机译:正在开发高性能的基于硅的微光开关,以应用于光网络。通过用KOH对(100)单晶硅进行批量微加工,在一级掩模步骤中制造了机械零件。将所得结构与厚度为100μm的坡莫合金片组装在一起,然后将其与用于电磁致动的小型磁路相关联。为了避免在保持开和关状态时的功耗,提出了一种双稳态工作原理。通过使用由于悬臂刚度而产生的稳定的机械位置以及由于永磁体而产生的第二磁稳定的位置,来获得双稳态行为。开关操作由绕组中的电流提供。本文的目的是通过有限元建模(FEM)仿真,使用ANSYS软件,对该系统的建模和优化进行研究。进行迭代磁电机模拟。提出了尺寸和材料性能的优化。

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