Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating

摘要

The contacting surfaces of a microfabricated polycrystalline silicon (polysilicon) double-clamped beam adhesion test structure have been modified with a thin ultra-hard, wear-resistant, and conformal silicon carbide (SiC) film. Adhesion forces in SiC-coated interfaces as a function of apparent area of contact have been determined quantitatively and compared with those in uncoated polysilicon contacts. Furthermore, contact reliability studies have been carried out by following the changes in physicochemical properties of the surfaces after >100 billion contact cycles. The results highlight the tribological benefits of SiC coating as a solid lubricant in devices undergoing cyclic contacts.