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Tailoring the graphene/silicon carbide interfacefor monolithic wafer-scale electronics

机译:为单片晶圆级电子设备量身定制石墨烯/碳化硅界面

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摘要

Graphene is an outstanding electronic material, predicted to have a role in post-siliconelectronics. However, owing to the absence of an electronic bandgap, graphene switchingdevices with high on/off ratio are still lacking. Here in the search for a comprehensive conceptfor wafer-scale graphene electronics, we present a monolithic transistor that uses the entirematerial system epitaxial graphene on silicon carbide (0001). This system consists of thegraphene layer with its vanishing energy gap, the underlying semiconductor and their commoninterface. The graphene/semiconductor interfaces are tailor-made for ohmic as well as forschottky contacts side-by-side on the same chip. We demonstrate normally on and normally offoperation of a single transistor with on/off ratios exceeding 10~4 and no damping at megahertzfrequencies. In its simplest realization, the fabrication process requires only one lithographystep to build transistors, diodes, resistors and eventually integrated circuits without the needof metallic interconnects.
机译:石墨烯是一种杰出的电子材料,预计将在后硅电子学中发挥作用。然而,由于不存在电子带隙,因此仍然缺乏具有高开/关比的石墨烯开关器件。在为晶圆级石墨烯电子学寻求全面概念的过程中,我们提出了一种单片晶体管,其在碳化硅(0001)上使用整个材料系统外延石墨烯。该系统由具有消失的能隙的石墨烯层,下面的半导体及其公共界面组成。石墨烯/半导体接口是为在同一芯片上并排排列的欧姆接触和肖特基接触量身定制的。我们演示了一个开/关比超过10〜4且在兆赫兹频率无阻尼的单个晶体管的正常导通和正常截止状态。在最简单的实现中,制造过程仅需要一个光刻步骤即可构建晶体管,二极管,电阻器以及最终的集成电路,而无需金属互连。

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