Test Structure to Determine Tip Sharpness of Micromechanical Probes of Scanning Force Microscopy

摘要

A test structure on the basis of nanoprofiled aluminum to determine the curvature radius of the cantilever tip is described. This structure was tested by studying tips with different geometries. The test struc ture allows one to determine the tip sharpness geometry with an ccuracy of 2 nm.