Single Sub-20 nm Wide,Centimeter-Long Nanofluidic Channel Fabricated by Novel Nanoimprint Mold Fabrication and Direct Imprinting

摘要

We report and demonstrate a new method to fabricate single fluidic-channels of uniform channel width (11-50 nm) and over 1.5 cm in length,which are essential to developing innovative bio/chemical sensors but have not been fabricated previously.The method uses unconventional nanofabrication (a combination of crystallographic anisotropic etching,conformal coating,and edge patterning,etc.) to create an imprint mold of a channel pattern and nanoimprint to duplicate such channel.The centimeter-long channel continuity is verified by flowing fluorescent dye-stained water and stretching and transporting DNAs.The 18 by 20 nm channel cross-section was confirmed by measuring the liquid conductance in the channel.