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Static, eigenvalue problem and bifurcation analysis of MEMS arches actuated by electrostatic fringing-fields

机译:静电边缘场驱动的MEMS拱的静态,特征值问题和分叉分析

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摘要

In this work, we investigate the structural behavior of a micro-electromechanical system arch microbeam actuated by electric fringing-fields where the electrodes are located at both side of the microbeam. In this particular configuration, the electrostatic actuating force is caused by the asymmetry of the fringing electric fields acting in a direction opposite to the relative deflection of the microbeam. A reduced-order model is derived for the considered system using the so-called Galerkin decomposition and assuming linear undamped mode shapes of a straight beam as basis functions in the decomposition process. A static analysis is performed to investigate the occurrence of any structural instability. The eigenvalue problem is then investigated to calculate the fundamental as well as higher natural frequencies variation of the microbeam with the applied DC load. A bifurcation analysis is then implemented to derive a criterion for whether symmetric or asymmetric bifurcation is occurring during the static structural instability. The results show elimination of the so-called pull-in instability in this kind of systems as compared to the regular case of parallel-plates electrostatic actuation. The bifurcation analysis shows that the arch goes for asymmetric bifurcation (symmetry breaking) with increase in initial elevation without the occurrence of symmetric bifurcation (snap-through) for any initial elevation.
机译:在这项工作中,我们研究了由电极边缘位于微束两侧的电边缘场驱动的微机电系统拱形微束的结构行为。在该特定配置中,静电致动力是由沿与微束的相对偏转相反的方向作用的边缘电场的不对称引起的。对于所考虑的系统,使用所谓的Galerkin分解并假设直线光束的线性无阻尼模态形状作为分解过程的基础函数,可以得到降阶模型。进行静态分析以调查任何结构不稳定性的发生。然后研究特征值问题,以计算在施加直流负载的情况下微束的基本以及更高的固有频率变化。然后实施分叉分析,以得出在静态结构不稳定性期间是否发生对称分叉或非对称分叉的标准。结果表明,与常规的平行板静电致动相比,这种系统消除了所谓的拉入不稳定性。分叉分析表明,拱形随着初始标高的增加而发生不对称分叉(对称性破坏),而对于任何初始标高都没有出现对称分叉(直通)。

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