SEMICONDUCTOR INTEGRATED CIRCUIT WITH ELECTROSTATIC ACTUATOR DRIVING CIRCUIT, MEMS, AND METHOD FOR DRIVING ELECTROSTATIC ACTUATOR

摘要

A semiconductor integrated circuit, electrostatic actuators, detection circuit, and a memory circuit, and a bias circuit. It said electrostatic actuators are disposed between the insulating layer has an upper electrode, lower electrode, the upper electrode and the lower electrode. The detection circuit detects the amount of charge accumulated in the insulating film of the electrostatic actuator. It said memory circuit, and stores the detection result of the charge amount detected by the detection circuit. The bias circuit is, on the basis of the detection result stored in the storage circuit, thereby changing the drive voltage for driving the electrostatic actuators. ; The electrostatic actuator, an upper electrode, lower electrode, dielectric film, the charge accumulation amount detecting circuit, the pull-out voltage